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  3. Ims5420-th Wafer Thickness Measuring System - Interferometers (white light)
Ims5420-th Wafer Thickness Measuring System - Interferometers (white light)
Ims5420-th Wafer Thickness Measuring System - Interferometers (white light)Ims5420-th Wafer Thickness Measuring System - Interferometers (white light)

Ims5420-th Wafer Thickness Measuring System - Interferometers (white light)

Sensors

About this product

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The IMS5420 is a high-performance white light interferometer for non-contact thickness measurement of monocrystalline silicon wafers. The controller has a broadband superluminescent diode (SLED) with a wavelength range of 1,100 nm. This enables the thickness measurement of undoped, doped and highly doped SI wafers with only one measuring system. The IMS5420 achieves a signal stability of less than 1 nm. The thickness can be measured from a distance of 24 mm.

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MICRO-EPSILON

Koenigbacher Strasse 15, Ortenburg 94496
Germany
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Delivery: Worldwide
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Founded: 1968
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Employees: 1000+
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