TOPOS Interferometric Measurement Systems

TOPOS Interferometric Measurement Systems for Non-Contact Flatness Testing of Precision Machined Parts TOPOS interferometers operate on the principle of fringe light incidence, allowing for the measurement of flatness even on rougher parts that no longer display a fringe pattern when using a flat glass or Fizeau interferometer. The flatness of a part is determined by a computer from the interference fringe pattern. In addition to lapped or finely ground parts, polished parts can also be measured. The parts can be made from a variety of materials: - Metal (steel, aluminum, bronze, copper, etc.) - Ceramic (AL2O3, SiC, SiN, etc.) - Plastic - etc. The interferometers can be set up in the production area near the machining machine. The absolute accuracy is up to 0.1 µm across the entire measurement field.