High Precision Vacuum Gauges - 1000 ... 500 Torr / mbar

INFICON SKY CDG100D manometers are your best choice for accurate total pressure measurement and control. CDG100D gauges are temperature controlled at 100 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 100 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications. with EtherCAT digital interface available now ! (1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation. (2)... Accuracy (1):0.2 on zero:0.0025 on span:0.02 Pressure, max.:400 Resolution:0.003 Lowest reading:0.01 Lowest suggested reading:0.05 Lowest suggested control pressure:0.5 Operation (ambient) (5):+10 … +50 Bakeout at flange:≤110 Storage:–20 … +65 Supply voltage:+14 … +30 VDC or ±15 V (±5%) During Heat up:≤15 At operating temperature:≤10 Output signal (analog):0 … +10 Response time (2):30 Degree of protection:IP 40 CE conformity:EN 61000‑6‑2/-6-3, EN 61010 & RoHS ETL certification:UL 61010‑1, CSA 22.2 No.61010‑1 SEMI compliance (5):SEMI S2 Electrical connection:D-sub, 15 pole, male Number of setpoints:2 (SP1,SP2) Relay contact:≤30 Protocol:RS232-C Read:pressure, status, ID Set:set points, filter, zero adjust, factory reset, DC offset Materials exposed to vacuum:Aluminum oxide ceramic (AI 2O 3), stainless steel (AISI 316L (4)) I. volume 1/2'' tube:4.2 (0.26) I. volume DN 16 ISO KF:4.2 (0.26) I. volume DN 16 CF-R:4.2 (0.26) I. volume 8 VCR®:4.2 (0.26) Weight 1/2'' tube:837 Weight DN 16 ISO KF:852 Weight DN 16 CF-R:875 Weight 8 VCR®:897 Protocol EtherCAT:protocol specialized for EtherCAT Communication standards:Vacuum Pressure Gauge