Всички категории
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RF Технология за Усещане
Относно този продукт
Посетете страницата на доставчика за продуктиSion™ RF детекторът ви дава по-строг контрол и по-високи добиви в процесите на химично парно отлагане (CVD) и ецване, като надеждно и точно определя края на почистването на камерата. По-точното определяне на края означава по-ниски нива на частици на вафлата и повече време между цикли на превантивна поддръжка.
Предоставяйки редица предимства в сравнение с контролерите, базирани на оптични емисионни спектрометри (OES), Sion работи с FabGuard® Интеграционна и Анализна Система, за да намали загубеното време и материали, които произтичат от недостатъчно или прекомерно ецване на камерата.
ПотвърденоINFICON GMBH
Bonner Strasse 498, Köln 50968
Германия
Доставка: В световен мащаб
Основан: 1995
Служители: 200-499
Тип на доставчика
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ПроизводствоПодобни продукти
1/15
Подобни продукти
1/15
RF Технология за Усещане
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